Descrizione
Low vapor pressures and its ability to be reclaimed make this an excellent choice for plasma, CVD and other semiconductor operations. These synthetic lubricants provide superior performance and extended life as lubricants and sealants in:
- Vacuum pumps where safety is critical
- Hostile environments where semiconductor process chemicals can attack most other lubricants
- Vacuum system valves, seals, bearings, and connectors where low vapor pressure, outgassing, and contamination are intolerable